High-resolution/accuracy and wide range. I: 1 fA to 1 A (20 fA offset accuracy),

    V: 1 µV to 100 V

Fully-automated I-V sweep measurements with dc or pulse mode, expandable

    up to 6 SMUs

Synchronized stress/measure function, two high-voltage pulse generator

    units  (±40 V)

Time-domain measurement: 60 µS variable intervals, up to 10,001 points

Easy to use: knob-sweep similar to curve tracer, automatic analysis functions

Automation: built-in HP Instrument BASIC, trigger I/O capability

HRSMU: 1fA/1uV to 100mA/100V x 4ea

       (20 fA offset accuracy)

VMU: Voltage Monitor Unit x 2ea

VSU: Voltage Source Unit x 2ea