MPSMU: 10fA/1uV to 100mA/100V x 4ea
VMU: Voltage Monitor Unit x 2ea
VSU: Voltage Source Unit x 2ea

- high-resolution/accuracy and a wide range
   I : 10 fA to 100 mA, V : 1 uV to 100 V
- fully automated I-V sweep measurements with dc or pulse mode
- expandable up to 6 SMUs
- synchornized stress/measure fuction
- two high-voltage pulse generator units (± 40 V)
- time domain mesurement: 60 us - variable intervals, up to 10,001 points
- easy to use: knob-sweep similar to curve tracer
- automatic analysis functions, and automation: built-in HP Instrument BASIC