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C-V Analyzer

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KEITHLEY

모델

590

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Keithley 590 Features:

  • 0.1fF sensitivity to test small devices
  • Ranges up to 20nF (at 100kHz, using the Model 5904 adapter) to test large, leaky, or forward biased devices
  • Test signal voltage of 15mV rms
  • Choice of 1MHz frequency for compliance with existing test standards or 100kHz for improved resolution, range, and accuracy
  • Selectable measurement rate (1 to 1000 readings per second) and filter to optimize speed/resolution trade-of
  • Sophisticated correction for transmission line errors due to device connections
  • Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming
  • 100kHz, 1MHz, or 100kHz/1MHz test frequencies
  • Measures capacitance (10fF-20nF) and conductance (0.1nS-1µS)
  • Internal correction for errors due to cables, connections, and switching paths
  • Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming

Keithley 590 Specifications:

100 kHz (4.5 Digits)
RangeResolutionAccuracy (1 Year)
18°-28°C ±(%rdg + counts)

P-P Noise Filter On

Temp. Coefficient 0°-18°C & 28°-50°C ±(%rdg + counts)/°C

Shunt Capacitance Loading Effect ±(%rdg + counts)

2 pF0.1 f F0.12% + (500 - G/GFS + 200)6 fF0.02% + (20 - G/GFS)0.1 % + (3 - G/GFS)
2 µS0.1 nS0.12% + ( 50 - C/CFS + 200)4 nS0.02% + ( 7 - C/CFS)0.1 % + (3 - C/CFS)
20 pF1 f F0.12% + (260 - G/GFS + 10)6 fF0.02% + (20 - G/GFS)0.1 % + (3 - G/GFS)
20 µS1 nS0.12% + ( 22 - C/CFS + 10)4 nS0.02% + ( 7 - C/CFS)0.1 % + (3 - C/CFS)
200 pF10 f F0.12% + (260 - G/GFS + 5)90 fF0.02% + (20 - G/GFS)0.1 % + (3 - G/GFS)
200 µS10 nS0.12% + ( 22 - C/CFS + 5)60 nS0.02% + ( 7 - C/CFS)0.1 % + (7 - C/CFS)
2 nF100 f F0.12% + (260 - G/GFS + 5)900 fF0.02% + (20 - G/GFS)0.02% + (2 - G/GFS)
2 mS100 nS0.12% + ( 22 - C/CFS + 5)0.6 µS0.02% + ( 7 - C/CFS)0.02% + (3 - C/CFS)
20 nF *1 pF0.25% + (260 - G/GFS + 5)39 pF0.1 % + (30 - G/GFS)0.02% + (2 - G/GFS)
20 mS1 µS0.25% + ( 22 - C/CFS + 5)6 µS0.1 % + (10 - C/CFS)0.02% + (2 - C/CFS)

Accuracy is max. limit for Q≥20; typical for Q≤20.
*using Keithley 5904 20nF/20mS Input Adaptor, please consult your sales representative for availability

1 MHz (4.5 Digits)
RangeResolutionAccuracy (1 Year)
18°-28°C ±(%rdg + counts)

P-P Noise Filter On

Temp. Coefficient 0°-18°C & 28°-50°C ±(%rdg + counts)/°C

Shunt Capacitance Loading Effect ±(%rdg + counts)

20 pF1 f F0.29% + (300 - G/GFS + 10)6 fF0.02% + (20 - G/GFS)0.5 % + (25 - G/GFS)
200 µS10 nS0.29% + (120 - C/CFS + 10)40 nS0.02% + ( 8 - C/CFS)0.5 % + (10 - C/CFS)
200 pF100 f F0.29% + (300 - G/GFS + 5)100 fF0.02% + (20 - G/GFS)0.35% + (40 - G/GFS)
2 mS100 nS0.29% + (120 - C/CFS + 5)700 nS0.02% + ( 8 - C/CFS)0.35% + (16 - C/CFS)
2 nF100 f F0.29% + (300 - G/GFS + 5)200 fF0.02% + (20 - G/GFS)0.35% + (40 - G/GFS)
20 mS1 µS0.29% + (120 - C/CFS + 5)1 µS0.02% + ( 8 - C/CFS)0.35% + (16 - C/CFS)

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